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Insights on film growth conditions on a floating substrate during reactive Ar/O<sub>2</sub> bipolar High Power Impulse magnetron sputter deposition.
Michiels, Matthieu; Britun, Nikolay; Caillard, Amael et al.
2023 • In Journal of Physics: D Applied Physics

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Insights on film growth conditions on a floating substrate during reactive Ar_O2 bipolar High Power Impulse magnetron sputter deposition. - IOPscience.pdf

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